The EMS 150T is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin-film applications. The EMS 150T replaces previous the following models EMS 575X and EMS 950X.
The EMS 150T is available in three formats:
EMS 150T S — a high resolution sputter coater, suitable for oxidising and non-oxidising metals
EMS 150T E — a high vacuum carbon coater for SEM and TEM applications
EMS 150T ES — a high resolution sputter coater and high vacuum carbon evaporator
Key Features- Metal sputtering or carbon evaporation - or both – in one space saving design
- Fine grain sputtering – for advanced high resolution FESEM applications
- High vacuum turbo pumping – allows sputtering of a wide range of oxidizing and non-oxidizing metals – suitable for SEM, high resolution FESEM and also for many thin film applications
- High vacuum carbon coating – ideal for SEM and TEM carbon coating applications
- Advanced design carbon rod evaation gun – simple operation, reproducible results
- Control of evaporation current profile – ensures consistently reproducible carbon films
- Precise thickness control using the film thickness monitor option
- Fully automatic touch screen control – rapid data input, simple operation
- Multiple, customer defined coating schedules can be stored – ideal for multi-user laboratories
- Automatic vacuum control, which can be preprogrammed to suit the process and material – no needle valve to adjust
- “Intelligent” recognition system – automatically detects the type of coating insert fitted
- Easy-to-change, drop-in style specimen stages (rotation stage as standard)
- Vacuum shutdown feature – leaves the process chamber under vacuum when not in use – improved vacuum performance
- Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
- Ergonomic one piece molded case – easy maintenance and service access
- Ethernet with local FTP server connection – simple programmer updates
- Power factor correction – complies with current legislation (CE Certification) – efficient use of power means reduced
Ideal for SEM, high resolution FESEM and TEM applicationsEMS150T is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the EMS 150T can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), a carbon coater suitable for SEM and transmission electron microscopy (TEM), or both, in a single easy to use system.
The ability of the EMS150T to rapidly sputter a wide selection of oxidizing and non-oxidizing metals also makes it an ideal platform for many thin film applications.
Please visit www.emsdiasum.com/microscopy for complete details.