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The Evactron® Plasma Decontaminator is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers, improving electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples.
The Evactron Decontaminator plasma source can be rack mounted or installed on most vacuum chambers and electron microscopes. A wide range of products and connectors are available to best meet your needs.
See the ordering tables for recommendations based on your equipment. Flanges for common brands of equipment are available at the end of the page. If you do not see your brand listed, please contact us for additional options.
Evactron plasma cleaners can now be configured for alternate gases!
The Evactron E50 alternate gas PRS has two configurations: an ultra-high purity filter (0.003 µm pore size) version to meet the stringent requirements of the semiconductor industry SEMI F38-0699 directive and the precision filter (0.5 µm pore size) version for general lab conditions.
The in-line filters prevent the introduction of particulates from gas feedlines into the plasma stream. Alternate gases which have been tested include O2, CDA, Ar/H2, Ar/O2, N2/H2, N2. The use of 100% H2 is not recommended for safety reasons.
Evactron Adapter Flanges
Flange adapters are available for all makes and models of SEMS and FIB/SEMs. Please contact us for more information.
Cat # | Description | Pack | Price | Quote | Quantity | |
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Cat #: 91000-01 | Description: Evactron E50 Plasma Decontaminator-Hitachi/JEOL | Pack: Each | Price: $25,022.00 | Add to Quote: |
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Cat #: 91000-02 | Description: Evactron E50 Plasma Decontaminator-FEI/Tescan/Zeiss | Pack: Each | Price: $25,022.00 | Add to Quote: |
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Cat #: 91000-03 | Description: Evactron E50 Plasma Decontaminator w/ Alt. Gas Feed | Pack: Each | Price: $27,248.00 | Add to Quote: |
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Cat # | Description | Pack | Price | Quote | Quantity | |
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Cat #: 91000-27 | Description: Evactron E50 E-TC Plasma De-Contaminator, Hitachi/JEOL | Pack: Each | Price: $0.00 | Add to Quote: |
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Cat #: 91000-28 | Description: Evactron E50 E-TC Plasma De-Contaminator, FEI/Tescan/Zeiss | Pack: Each | Price: $0.00 | Add to Quote: |
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Cat #: 91000-29 | Description: Evactron E50 E-TC Decontaminator w/Ultra Filter | Pack: Each | Price: $0.00 | Add to Quote: |
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Cat #: 91000-30 | Description: Evactron E50 E-TC Decontaminator w/ Alt. Gas Feed | Pack: Each | Price: $0.00 | Add to Quote: |
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Cat # | Description | Pack | Price | Quote | Quantity | |
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Cat #: 91000-11 | Description: Evactron EP Plasma Decontaminator + Android For Hitachi | Pack: Each | Price: $19,000.00 | Add to Quote: |
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Cat #: 91000-12 | Description: Evactron EP Plasma Decontaminator + Android For JEOL | Pack: Each | Price: $19,000.00 | Add to Quote: |
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Cat #: 91000-13 | Description: Evactron EP Plasma Decontaminator + Android For Zeiss | Pack: Each | Price: $19,000.00 | Add to Quote: |
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Cat # | Description | Pack | Price | Quote | Quantity | |
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Cat #: 91000-10 | Description: Evactron 25 Zephyr Plasma Decontaminator | Pack: Each | Price: $26,686.00 | Add to Quote: |
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Cat # | Description | Pack | Price | Quote | Quantity | |
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Cat #: 91000-15 | Description: Evactron SoftClean EP | Pack: Each | Price: $35,756.00 | Add to Quote: |
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Cat # | Description | Pack | Price | Quote | Quantity | |
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Cat #: 91000-18 | Description: TEM Adapter for Jeol | Pack: Each | Price: $2,450.00 | Add to Quote: |
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Cat #: 91000-19 | Description: TEM Adapter for FEI | Pack: Each | Price: $2,450.00 | Add to Quote: |
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Cat #: 91000-20 | Description: TEM Adapter for Zeiss | Pack: Each | Price: $2,450.00 | Add to Quote: |
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Cat #: 91000-21 | Description: TEM Adapter for Hitachi | Pack: Each | Price: $2,450.00 | Add to Quote: |
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Cat #: 91000-17 | Description: Evactron CombiClean System | Pack: Each | Price: $59,200.00 | Add to Quote: |
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Cat #: 91000-22 | Description: TEM Adapter for JEOL Sample Rod | Pack: Each | Price: $2,472.00 | Add to Quote: |
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Cat #: 91000-23 | Description: TEM Adapter for Hitachi Sample Rod | Pack: Each | Price: $2,450.00 | Add to Quote: |
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Cat #: 91000-24 | Description: TEM Adapter for FEI Sample Rod | Pack: Each | Price: $2,450.00 | Add to Quote: |
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Cat #: 91000-25 | Description: Evactron PRS-Z | Pack: Each | Price: $0.00 | Add to Quote: |
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Cat #: 91000-26 | Description: Evactron Cable Bundle | Pack: Each | Price: $0.00 | Add to Quote: |
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