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Mex is a very easy to use package for the creation of 3D images for subsequent measurement with the SEM. The software will do nothing to correct faulty images nor will it allow you to see features that are not on the sample. But by following a few simple procedures the results will be both spectacular and contain significant data, these simple procedures are shown below.
Note:
To take images for MeX it is necessary to have Eucentric Images, it is not necessary to have a Eucentric Stage to take Eucentric Images. What is also important is that when tilt is applied the image moves east to west (or west to east) and not north to south or any diagonal from that.
A simple method without a Eucentric Stage is
1) Find and identify a feature on the image that can be used as a reference
2) Either turn on the cross wires built into the SEM or stick a corner of a post it note on the feature
3) Decide which magnification the image is to be taken at, then go 2 magnification steps above that and align the feature
4) Drop the magnification down and take the image
5) Reduce magnification to a level where the bulk of the feature is still visible (this makes it easier to track when tilt is applied)
5) Apply tilt bringing the feature back into the frame with X or and Y
6) Either turn on the cross wires built into the SEM or stick a corner of a post it note on the feature
7) Then go 2 magnification steps above the magnification selected in #3 and align the same feature
8) Drop the magnification down and take the second image
If a third image is required simply repeat the process
Details on image requirements are available in pdf format.
Mex 3D Software product information
MeX Requirements (pdf format)
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