Questions? 800-523-5874 | info@emsdiasum.com
The test specimen consists of lines etched into a single crystal silicon substrate, written by electron beam machinery. It consists of a square mesh of course lines of 500µm spacing with 50 intermediate fine lines of 10µm spacings.
The 10µm pitch has been measured using an automatic line width measuring system.
Position |
Pitch Meas.
|
|
1 | 10.004 | |
2 | 9.997 | |
3 | 9.989 | |
4 | 10.004 | |
5 | 9.997 | |
6 | 9.988 | |
7 | 9.982 | |
8 | 10.001 | |
9 | 9.969 | |
10 | 9.953 | |
11 | 9.975 | |
12 | 9.986 | |
13 | 9.944 |
Measurement Stats |
||
Max | 10.004 | |
Min | 9.944 | |
Mean | 9.984 | |
Standard Deviation | 0.02 |